History of Robotics Research and Development of Japan1976BusinessTransistor Assembly System

Masakazu EjiriCentral Laboratory, Hitachi, Ltd.
Takafumi MiyatakeCentral Laboratory, Hitachi, Ltd.
Seiji KashiokaCentral Laboratory, Hitachi, Ltd.
Michihiro MeseCentral Laboratory, Hitachi, Ltd.
Yoshihiro ShimaCentral Laboratory, Hitachi, Ltd.
Hiroshi SakoCentral Laboratory, Hitachi, Ltd.
Yuzaburo SakamotoSemiconductor Business Group, Hitachi, Ltd.
Isamu YamazakiSemiconductor Business Group, Hitachi, Ltd.
Toshimitsu HamadaProduction Engineering Research Laboratory, Hitachi, Ltd.
A vision-based fully automatic transistor assembly system was developed and put into use in 1973 (Photo 1). This system was able to automatically detect electrode positions on tiny transistor chips (with the size of 0.4mm square to 0.6mm square) using pattern recognition technology and connect each electrode to outer lead with a fine gold wire (Photo 2). This system is characterized by the following technologies:1 A local-parallel type hardware technology using 2D local memory for enabling high-speed pattern matching (Fig. 1), 2 A multiple local pattern matching technology for enabling high-reliability electrode position detection (Fig. 1), and 3 A group control technology for enabling the simultaneous control of up to 50 assembly machines with a single computer. This was the world-first practical system for automatic transistor assembly, and soon expanded its use to the assembly of ICs and LSIs. The technology was also transferred to various semiconductor firms and equipment companies and spread over the world as one of the industry standards. Consequently, this system played a great role in the advancement of worldwide semiconductor industry, and the technology developed here is still being widely used as one of the key technologies in semiconductor fabrication. Technology Award, Japan Society for Promotion of Machine Industry, 1975. (Outstanding Industrial Technology Award, Prime Minister of Japan, 1978.
写真1 トランジスタ組立システム
Photo 1 Transistor assembly system
写真2 組立結果
Photo 2 An example of result of assembly
図1 複合型部分パターンマッチング法
Fig.1 Multiple local pattern matching method


Correspondence papers

S. Kashioka, M. Ejiri, and Y. Sakamoto: A Transistor Assembly System Utilizing Time-shared Visual Image Processing

Transaction of the IEEJ, Vol. C-96, No. 1, pp. 9-16, Jan. 1976 (in Japanese).

S. Kashioka, M. Ejiri, and Y. Sakamoto:A Transistor Wire-Bonding System Utilizing Multiple Local Pattern Matching Techniques

IEEE Trans. SMC, Vol. SMC-6, No. 8, pp. 562-570, Aug. 1976.

M. Mese, T. Miyatake, S. Kashioka, M. Ejiri, I. Yamazaki, and T. Hamada:An Automatic Recognition Technique for LSI Assembly

Proc. 5th IJCAI, pp. 685-693, 1977.

Related papers

[1] Y. Shima, S. Kashioka, and M. Ejiri
A Fast Algorithm for Template Pattern Matching Based on Probability of Occurrence of Sub-Patterns
Transaction of the IEICE, Vol.J68-D, No.2, pp.161-168, Feb. 1985 (in Japanese).

[2] S. Kashioka, Y. Shima, and M. Ejiri
Automatic Template Selection Technique for the Local Pattern Matching Method
Transaction of the IEICE, Vol.J 68-D, No. 5, pp. 1103-1110, May 1985 (in Japanese).

[3] Y. Sako, T. Miyatake, Y. Shima, S. Kashioka, and M. Ejiri
A Position Recognition Algorithm Based on the Distribution of Characteristic Patterns
Transaction of the IEICE, Vol. J71-D, No. 7, pp. 1258-1266, July 1988 (in Japanese).

[4] H. Sakou, T. Miyatake, S. Kashioka, and M. Ejiri
A Position Recognition Algorithm for Semiconductor Alignment Based on Structural Pattern
Matching, IEEE Trans. ASSP, Vol. 37, No. 12, pp.2148-2157, Dec. 1989.

Related Article